| 摘要 |
In accordance with one aspect of the present invention, a MEMS switch 10,30,40 is provided. The MEMS switch 10,30,40 includes a substrate 12, a first 21,41 and a second 22,42 actuating element electrically coupled together, an anchor 18 mechanically coupled to the substrate 12 and supporting at least one of the first 21,41 and second 22,42 actuating elements, and a gate driver 6 configured to actuate the first 21,41 and second 22,42 actuating elements. |
