发明名称 |
Nanopillar E-fuse structure and process |
摘要 |
Techniques for incorporating nanotechnology into electronic fuse (e-fuse) designs are provided. In one aspect, an e-fuse structure is provided. The e-fuse structure includes a first electrode; a dielectric layer on the first electrode having a plurality of nanochannels therein; an array of metal silicide nanopillars that fill the nanochannels in the dielectric layer, each nanopillar in the array serving as an e-fuse element; and a second electrode in contact with the array of metal silicide nanopillars opposite the first electrode. Methods for fabricating the e-fuse structure are also provided as are semiconductor devices incorporating the e-fuse structure.
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申请公布号 |
US8344428(B2) |
申请公布日期 |
2013.01.01 |
申请号 |
US20090627747 |
申请日期 |
2009.11.30 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;CHAKRAVARTI SATYA N.;GUO DECHAO;BU HUIMING;WONG KEITH KWONG HON |
发明人 |
CHAKRAVARTI SATYA N.;GUO DECHAO;BU HUIMING;WONG KEITH KWONG HON |
分类号 |
H01L23/52 |
主分类号 |
H01L23/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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