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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JP2663956(B2)
申请公布日期
1997.10.15
申请号
JP19910081512
申请日期
1991.03.20
申请人
ROOMU KK
发明人
HIGUCHI YASUYUKI
分类号
H01L29/43;H01L21/28;H01L21/8222;H01L27/082;(IPC1-7):H01L29/43;H01L21/822
主分类号
H01L29/43
代理机构
代理人
主权项
地址
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