发明名称 Three-dimensional pattern forming material
摘要 There is provided a photo-curable composition that shows the suppression of a residual film formation and a high adhesion thereof to a substrate in a process for forming a three-dimensional pattern by a photo-imprinting method. A photo-curable composition for forming a three-dimensional pattern by a photo-imprinting method, comprises a monomer having a photopolymerizable group; an inorganic fine particle to which a dispersant is added; and a photopolymerization initiator. It is preferred that the inorganic fine particle (e.g., silica) has an average particle diameter of 1 to 1,000 nm, and the dispersant is a silane coupling agent, particularly a silane coupling agent containing an organic group having a carbon-carbon unsaturated bond or an organic group having an epoxy group.
申请公布号 US8344039(B2) 申请公布日期 2013.01.01
申请号 US20080743681 申请日期 2008.11.21
申请人 NISSAN CHEMICAL INDUSTRIES, LTD.;HANABATA MAKOTO 发明人 HANABATA MAKOTO
分类号 H01L21/027;C08F2/46;C08F292/00;G03C9/00 主分类号 H01L21/027
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