发明名称 Capacitive electro-mechanical transducer, and fabrication method of the same
摘要 A capacitive electro-mechanical transducer includes a plurality of cavities, a communicating portion for connecting the cavities to each other, and two electrodes sandwiching each of the cavities. The cavities are sealed from outside, and at least a portion of the communicating portion is closed to interrupt the communication between the cavities through the communicating portion.
申请公布号 US8344587(B2) 申请公布日期 2013.01.01
申请号 US20100774492 申请日期 2010.05.05
申请人 CANON KABUSHIKI KAISHA;SOEDA YASUHIRO 发明人 SOEDA YASUHIRO
分类号 H02K19/00 主分类号 H02K19/00
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