发明名称 |
Self aligning non contact shadow ring process kit |
摘要 |
The invention provides a removable first edge ring configured for pin and recess/slot coupling with a second edge ring disposed on the substrate support. In one embodiment, a first edge ring includes a plurality of pins, and a second edge ring includes one or more alignment recesses and one or more alignment slots for mating engagement with the pins. Each of the alignment recesses and alignment slots are at least as wide as the corresponding pins, and each of the alignment slots extends in the radial direction a length that is sufficient to compensate for the difference in thermal expansion between the first edge ring and the second edge ring.
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申请公布号 |
US8342119(B2) |
申请公布日期 |
2013.01.01 |
申请号 |
US20070870285 |
申请日期 |
2007.10.10 |
申请人 |
APPLIED MATERIALS, INC.;YUDOVSKY JOSEPH;LEI LAWRENCE C.;UMOTOY SALVADOR;MADAR TOM;DIXIT GIRISH;TZU GWO-CHUAN |
发明人 |
YUDOVSKY JOSEPH;LEI LAWRENCE C.;UMOTOY SALVADOR;MADAR TOM;DIXIT GIRISH;TZU GWO-CHUAN |
分类号 |
C23C16/458;C30B25/12;C30B31/14;H01L21/205 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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