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发明名称
SELECTIVE ETCHING OF SILICON DIOXIDE COMPOSITIONS
摘要
申请公布号
MY147667(A)
申请公布日期
2012.12.31
申请号
MY2009PI03531
申请日期
2009.08.26
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
GLENN MICHAEL MITCHELL;STEPHEN ANDREW MOTIKA;ANDREW DAVID JOHNSON
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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