A HAPTIC ACTUATOR PROCESS WITH FILM SHAPE BASED ON CELLULOSE

摘要

PURPOSE: A manufacturing method of a film type haptic actuator based on cellulose is provided to manufacture a haptic actuator from a thin film type by manufacturing the haptic actuator by using an operating unit comprised of cellulose thin films and a lower plate. CONSTITUTION: A lower plate is adhere to the upper side of substrate(S100). Photoresist is coated on the upper side of the lower plate(S200). An exposure process is performed by using a photomask(S300). A support is formed by partially removing the coated photoresist(S400). An operating unit is adhered on the support(S600). The operating unit is formed by cellulose film. The shape of the cellulose film is transformed depending on electric signals provided. [Reference numerals] (S100) Step for attaching lower plate to upper side of substrate; (S200) Step for coating photoresist on upper side of lower plate; (S300) Step for performing exposure process by using photomask; (S400) Step for forming support by partially removing coated photoresist; (S500) Step for forming adhesive layer on support; (S600) Step for attaching operating unit on support; (S700) Step for removing substrate