发明名称 CUTTING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a cutting device having a photographing function for photographing a state of a cut groove immediately after being cut by a cutting blade. <P>SOLUTION: A cutting device comprises: workpiece holding means for holding a workpiece; cutting means equipped with a cutting blade for cutting the workpiece held by the workpiece holding means; cut-feeding means for relatively cut-feeding the workpiece holding means and the cutting means in a cut-feeding direction; and index-feeding means for relatively index-feeding the workpiece holding means and the cutting means in an index-feeding direction perpendicular to the cut-feeding direction. The workpiece holding means has a holding surface made of a transparent body for holding the workpiece, and is equipped with a workpiece holding table disposed rotatably about an axis vertical to the holding surface, rotation driving means for rotating the workpiece holding table, and photographing means disposed under the workpiece holding table for photographing, through the workpiece holding table, a cut groove formed on the workpiece by the cutting blade. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012256749(A) 申请公布日期 2012.12.27
申请号 JP20110129298 申请日期 2011.06.09
申请人 DISCO ABRASIVE SYST LTD 发明人
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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