摘要 |
A stacked semiconductor device including a plurality of semiconductor chips stacked vertically, a plurality of scribe lane elements each forming a step with a semiconductor chip of the plurality of semiconductor chips and respectively formed on a side surface of each of the plurality of semiconductor chips, a redistribution element respectively formed on each of the plurality of semiconductor chips and the scribe lane elements, and a signal connection member formed on the side surface of each of the plurality of semiconductor chips and electrically connecting the redistribution elements. |