| 摘要 |
<p>A microwave resonant cavity (26) is provided. The microwave resonant cavity (26) includes: a sidewall (42) having a generally cylindrical hollow shape; a gas flow tube (46) disposed inside the sidewall and having a longitudinal axis substantially parallel to a longitudinal axis of the sidewall; a plurality of microwave waveguides (24a - 24c), each microwave waveguide having a longitudinal axis substantially perpendicular to the longitudinal axis of the sidewall and having a distal end secured to the sidewall and aligned with a corresponding one of a plurality of holes formed on the sidewall; a top plate (41) secured to one end of the sidewall; and a sliding short circuit (48) having: a disk (43) slidably mounted between the sidewall and the gas flow tube; and at least one bar (50) disposed inside the sidewall and arranged parallel to the longitudinal axis of the sidewall.</p> |
