发明名称 METAL LAMINATE STRUCTURE AND PRODUCTION METHOD FOR SAME
摘要 There is provided a metal laminated structure (100) in which a first metal layer (1) containing tungsten is provided on a first surface (2a) of a second metal layer (2) containing copper and a third metal layer (3) containing tungsten is provided on a second surface (2b) of the second metal layer (2) opposite to the first surface (2a), and the first metal layer (1) contains crystal grains of tungsten in a form of a columnar crystal extending in a direction perpendicular to the first surface (2a) of the second metal layer (2) and the third metal layer (3) contains crystal grains of tungsten in a form of a columnar crystal extending in a direction perpendicular to the second surface (2b) of the second metal layer (2), and a method for producing the metal laminated structure (100).
申请公布号 EP2537963(A1) 申请公布日期 2012.12.26
申请号 EP20100846190 申请日期 2010.12.27
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD.;A.L.M.T. CORP. 发明人 NITTA, KOJI;INAZAWA, SHINJI;HOSOE, AKIHISA;MAJIMA, MASATOSHI;SUWATA, OSAMU;YOKOYAMA, HIROSHI;YAMAGATA, SHINICHI;ABE, YUGAKU
分类号 B32B15/01;C22C9/00;C22C27/00;C22C27/04;C25D3/12;C25D3/38;C25D3/66;C25D5/10;C25D5/12;H01L23/373;H01L33/64 主分类号 B32B15/01
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