SUBSTRATE TRANSFER HAND AND SUBSTRATE TRANSFER DEVICE INCLUDING THE SUBSTRATE TRANSFER HAND

摘要

PURPOSE: A hand for transferring a substrate and a substrate transfer device including the same are provided to mount the substrate on the hand and transfer the substrate without inputting the hand to a cassette. CONSTITUTION: A cassette(30) includes a driving device(32), a driving shaft(33), a roller shaft(34), and a roller(35). A support bar(150) is connected to the cassette and includes a plurality of roller shafts(154). A first driven roller(151) and a second driven roller(153) are attached to both sides of the roller shaft. The first driven roller rotates by receiving the driving of the driving unit. A rotation transfer unit transfers the rotation of the first driven roller to the second driven roller.