| 摘要 |
[Object] To provide a piezoelectric microblower that can be made compact while still attaining good blower characteristics. [Solution] In part of a blower chamber 4 corresponding to a central portion of a vibrating plate 50, a resonance space 34 is formed by providing a partition 33 around an opening 31 and the size of the resonance space 34 is set such that the driving frequency of the vibrating plate 50 and the Helmholtz resonant frequency of the resonance space 34 correspond to each other. A gap ´ is formed between the partition 33 and the vibrating plate 50 so that there is no contact therebetween when the vibrating plate is displaced. An increase in the flow rate can be attained by utilizing resonance of air. |
