THIN FILM MANUFACTURING APPARATUS, THIN FILM MANUFACTURING METHOD, AND METHOD FOR MAINTAINING THIN FILM MANUFACTURING APPARATUS

摘要

The present invention aims to provide a thin-film manufacturing equipment, a method for manufacturing a thin film, and a method for maintaining a thin-film manufacturing equipment, which are capable of depositing with high productivity even in occurrence of unexpected failure. It is provided a thin-film manufacturing equipment including a group (42) of deposition chambers that is a collection of deposition chambers each provided with a deposition room, in which a thin film is deposited on a substrate, a movable chamber (6) designed to convey a substrate, and more than two substrate temporary keeping devices each for temporarily keeping a substrate, wherein the movable device is designed to deliver and receive the substrate to and from each of the deposition chambers and designed to perform at least one selected from a group consisting of receiving and discharging of the substrate from and to each of the more than two substrate temporary keeping devices.