LITI APPARATUS, METHOD OF LITI AND FABRICATING METHOD OF USING THE SAME

摘要

PURPOSE: A laser induced thermal imaging apparatus, a laser induced thermal imaging method, and a method for manufacturing an organic light emitting display device are provided to reduce a transfer failure by dividing thermal energy for imaging a donor film into a preheat process and an imaging process. CONSTITUTION: A donor film(20) is attached to a substrate(10) and includes a transfer layer(23), a base film(21), and a photothermal conversion layer(22). A patterning unit includes a first laser unit(40) functioning as a preheat unit and a second laser unit(30) functioning as a transfer unit. The first laser unit irradiates a linear laser beam(44) to a cell region. The second laser unit irradiates the laser beam inclined at a preset angle in a scan direction to the donor film of the substrate.