发明名称 |
Substrate holder and plating apparatus |
摘要 |
The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member. |
申请公布号 |
US8337680(B2) |
申请公布日期 |
2012.12.25 |
申请号 |
US201113017294 |
申请日期 |
2011.01.31 |
申请人 |
YOSHIOKA JUNICHIRO;HORIE KUNIAKI;GUO YUGANG;MORIKAMI SATOSHI;EBARA CORPORATION |
发明人 |
YOSHIOKA JUNICHIRO;HORIE KUNIAKI;GUO YUGANG;MORIKAMI SATOSHI |
分类号 |
C25B9/02;C25D7/12;C25D17/06;H01L21/00;H01L21/288;H01L21/60;H01L21/687 |
主分类号 |
C25B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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