发明名称 Transistor device comprising an embedded semiconductor alloy having an asymmetric configuration
摘要 In sophisticated semiconductor devices, an asymmetric transistor configuration may be obtained on the basis of a strain-inducing semiconductor alloy. To this end, strain relaxation implantation processes may be performed at the drain side according to some illustrative embodiments, while, in other cases, the deposition of the strain-inducing alloy may be performed in an asymmetric manner with respect to the drain side and the source side of the transistor.
申请公布号 US8338274(B2) 申请公布日期 2012.12.25
申请号 US20090648867 申请日期 2009.12.29
申请人 KRONHOLZ STEPHAN;PAPAGEORGIOU VASSILIOS;BEERNINK GUNDA;HOENTSCHEL JAN;GLOBALFOUNDRIES INC. 发明人 KRONHOLZ STEPHAN;PAPAGEORGIOU VASSILIOS;BEERNINK GUNDA;HOENTSCHEL JAN
分类号 H01L29/78;H01L21/20 主分类号 H01L29/78
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