BURIED TYPE OPTICAL INPUT/OUTPUT DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A buried type optical IO device and a method thereof are provided to prevent the damage of a waveguide, a coupler, and a photo detector. CONSTITUTION: An optical IO device comprises a base board(100), a coupler(300), a photo detector(400), and a waveguide(200). The base board comprises a trench. The waveguide is located in the trench. The photo detector is located in the trench and connected with the waveguide optically. The upper side of the photo detector has the same level with the upper side of the waveguide.