APPARATUS AND METHOD FOR THIN FILM DEPOSITION, APPARATUS AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DEVICE USING THE SAME

摘要

PURPOSE: An apparatus and method for depositing a thin film and an apparatus and method for manufacturing an organic light emitting device using the same are provided to reduce facility costs by reducing the number of processing chambers. CONSTITUTION: A processing chamber(110) provides a deposition space. A substrate reversing unit(120) reverses a substrate to a substrate loading and unloading position or a process position upwardly or downwardly while being pivotally installed and supporting the substrate. A deposition material providing unit(130) provides a deposition material to be deposited to the substrate, which is reversed to the process position, while being installed in a deposition chamber.