| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for substantially reducing cost and time which are spent for recipe tuning in conditioning a polishing pad and monitoring a polishing surface of a polishing pad without unsticking the polishing pad from a polishing table. <P>SOLUTION: According to this method, a rotating dresser 50 is swung on the polishing surface 22a of the polishing pad 22 to thereby condition the polishing surface 22a and the height of the polishing surface 22a is measured during the conditioning of the polishing surface 22a. Then, the position is calculated at which the height of the polishing surface 22a has been measured on a two-dimensional plane defined on the polishing surface 22a to repeat the measurement of the height of the polishing surface 22a and the calculation of the measured position of the height, thus producing a height distribution within the polishing surface 22a. <P>COPYRIGHT: (C)2013,JPO&INPIT |
