| 摘要 |
<P>PROBLEM TO BE SOLVED: To disclose a lithographic projection apparatus comprising a table, a shutter member, fluid handling structure, and a fluid extraction system. <P>SOLUTION: Fluid handling structure supplies and shuts in liquid between a projection system and (i) a substrate, (ii) a substrate table, (iii) a surface of a shutter member, or (iv) an arbitrary combination selected from (i)-(iii). The surface of the shutter member adjoins a surface of the table and is disposed on the same surface of the table. The surface of the shutter member and the surface of the table can be separated by gap. A fluid extraction system removes the liquid from the gap. <P>COPYRIGHT: (C)2013,JPO&INPIT |
