发明名称 CORNER-ROUNDED STRUCTURES AND METHODS OF MANUFACTURE
摘要 Corner-rounded structures and methods of manufacture are provided. The method includes forming at least two conductive wires with rounded corners on a substrate. The method further includes forming a insulator film on the substrate and between the at least two conductive wires with the rounded corners.
申请公布号 US2012319237(A1) 申请公布日期 2012.12.20
申请号 US201113163922 申请日期 2011.06.20
申请人 COONEY, III EDWARD C.;GAMBINO JEFFREY P.;HE ZHONG-XIANG;MCDEVITT THOMAS L.;MILO GARY L.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 COONEY, III EDWARD C.;GAMBINO JEFFREY P.;HE ZHONG-XIANG;MCDEVITT THOMAS L.;MILO GARY L.
分类号 H01L21/768;H01L23/522 主分类号 H01L21/768
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