| 摘要 |
PURPOSE: An apparatus for manufacturing a piezoelectric vibrating device is provided to reduce sealing inspection time by transporting the piezoelectric vibrating device to a hermetic sealing chamber and an inspection chamber in order. CONSTITUTION: A manufacturing device(7) comprises an introduction chamber(71), a preheating chamber(72), a hermetically sealed chamber(73), and an inspection chamber(75) which are successively arranged along an X-direction of a transmitting direction of a crystal vibrator. One pellet(8) on which a plurality of crystal vibrators is mounted is carried in the X-direction. A gate valve(76) is installed between the outside and the introduction chamber, between the introduction chamber and a first preheating chamber(721), between the hermetically sealed chamber and a temperature control chamber(74), between the temperature control chamber and the inspection chamber, and between the inspection chamber and the outside. The gate valve suppresses pressure changes by controlling atmospheric pressure within each chamber through opening and closing each chamber. [Reference numerals] (71) Introduction area; (721) First preheating chamber; (722) Second preheating chamber; (723) Third preheating chamber; (73) Hermetic sealing chamber; (74) Temperature control chamber; (751) First inspection chamber; (752) Second inspection chamber |
