METHOD FOR MANUFACTURING RUTHENIUM POWDER USING HYDROGEN REDUCTION METHOD

摘要

PURPOSE: A Ru powder preparation method using a hydrogen reduction method is provided to obtain high-purity Ru powder by using high-purity RuCl3.nH2O produced by evaporation of chlorine and controlling flow rate of supplied gas and heating time. CONSTITUTION: A Ru powder preparation method using a hydrogen reduction method comprises the steps of: inserting RuCl3.nH2O into a vacuum tube, sealing both ends of the vacuum tube and removing the interior from the vacuum tube, supplying mixed gas of Ar and H2 into the vacuum tube, and heating the vacuum tube with a heater to reduce Ru powder from the RuCl3.nH2O.