| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hole shape inspection method and a hole shape inspection program that remove luminance variation at an edge of a shape to be detected, and securely detect a chip and foreign matter. <P>SOLUTION: There is provided the hole shape inspection method and hole shape inspection program for determining whether a hole shape is good. The hole shape inspection method includes a quality determination process of determining that the hole is good when the number of pixels of a binarized filtering image is equal to or less than a predetermined value by including: a hole shape imaging process for hole; a binarized image forming process for hole shape image; a hole area determination process of determining whether the area of the hole is a predetermined value; a hole gravity center arithmetic process of finding the center of hole gravity of an inner shape of the hole; a filtering image forming process of performing concentric filtering centering on the center of hole gravity on the hole shape image, and being based upon the difference between average luminance of pixels on the concentric shape centering on the center of hole gravity and pixel luminance of one pixel; and a binarized filtering image forming process for filtering image. The program makes a computer implement the inspection method. <P>COPYRIGHT: (C)2013,JPO&INPIT |
