发明名称 |
PINHOLE INSPECTION METHOD OF INSULATOR LAYER |
摘要 |
A pinhole inspection method of an insulator layer, wherein the pinhole inspection method comprises steps as following: A dry etching process is firstly performed to remove a contiguous layer adjacent to the insulator layer. Subsequently an etching endpoint is determined and the dry etching process is then stopped in accordance with a second electron energy variation triggered by the dry etching process. Afterward, a cross-sectional morphology or topography of the insulator layer is inspected. |
申请公布号 |
US2012322170(A1) |
申请公布日期 |
2012.12.20 |
申请号 |
US201113159763 |
申请日期 |
2011.06.14 |
申请人 |
CHOU PO-FU;TSAI CHUN-MING;UNITED MICROELECTRONICS CORP. |
发明人 |
CHOU PO-FU;TSAI CHUN-MING |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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