DEFLECTION DEVICE FOR A SCANNER WITH LISSAJOUS SCANNING

摘要

A deflection device for a scanner with Lissajous scanning includes a micromirror that oscillates in at least two deflection axes and that includes a frame and a mirror plate that is movably arranged via a suspension mount. The deflection device also includes a control device for generating control signals for a resonant operation of the micromirror in the at least two deflection axes. The suspension mount includes at least one spring connected at one end to the mirror plate and at the other end to the frame. The frequencies of the control signals for the resonant operation of the micromirror are substantially equal in the at least two deflection axes, but differ at least in terms of the predefined scanning repetition rate. The levels of the resonance frequencies of the deflection axes and control signals are determined by a predefined scanning resolution and a predefined scanning repetition rate.