| 摘要 |
<p>The present invention relates to a vision inspection system used in a semiconductor inspection process, and more particularly, to a vision system which detects residual semiconductors and foreign substances in a socket during an electrical performance inspection using a test handler for a semiconductor, and which simultaneously performs cooling. The vision inspection system consists of: a test arm which contains a semiconductor to be tested, and which moves the semiconductor in the up/down, left/right, and forward/backward directions so that the semiconductor is seated on a socket; a vision camera positioned within a test box so as to photograph the shape of the socket; a control module for controlling the photographing perspective of the vision camera; and a determination module for comparing the images of the shape of the socket photographed by the vision camera, and making a determination on same. Thus, the vision inspection system has the effect of achieving an accurate inspection so as to improve reliability despite insufficient vacuum absorption, inaccuracy of a robot arm, or variation in the sizes of semiconductors.</p> |
