发明名称 |
AN APPARATUS FOR MANUFACTURING A SOLAR CELL |
摘要 |
<p>PURPOSE: A solar cell manufacturing device is provided to effectively maintain the flatness of a substrate by supporting the substrate using vacuum absorptive force. CONSTITUTION: A shower head(20) supplies gas to a substrate in a processing chamber(10). A gas supply pipe(21) and a supply pump(22) supply gas by being connected to the shower head. A vacuum forming device(50) includes an air intake tube(52) connected to the inside of the processing chamber, and a vacuum pump(51) forming vacuum pressure. A feeding roller(30) provides a roll-shaped flexible substrate(S) to the inside of a reaction chamber. A heater(60) heats the flexible substrate through a contact or non-contact method.</p> |
申请公布号 |
KR20120136473(A) |
申请公布日期 |
2012.12.20 |
申请号 |
KR20110055424 |
申请日期 |
2011.06.09 |
申请人 |
JUSUNG ENGINEERING CO., LTD. |
发明人 |
PARK, WON SEOK;KIM, YONG HYUN |
分类号 |
H01L31/18;H01L31/042 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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