发明名称 |
ROTATION SYSTEM FOR THIN FILM FORMATION |
摘要 |
A system for forming one or more layers of material on one or more substrates is disclosed. The system includes a susceptor that rotates around a central susceptor axis. One or more holder gears are located on the susceptor. The holder gears may rotate around the central susceptor axis with the susceptor. A central gear engaged to the holder gears may cause the holder gears to rotate around holder axes of the respective holder gears while the holder gears rotate around the central susceptor axis. The susceptor and the central gear may rotate independently.
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申请公布号 |
US2012321790(A1) |
申请公布日期 |
2012.12.20 |
申请号 |
US201213354225 |
申请日期 |
2012.01.19 |
申请人 |
FANG CHENG CHIA;YANG CHENG CHIEH;PINECONE MATERIAL INC. |
发明人 |
FANG CHENG CHIA;YANG CHENG CHIEH |
分类号 |
C23C16/458;C23C16/455 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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