| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stripping agent composition that does not use urea as an anticorrosive but can reliably exhibit anticorrosion performance at normal temperature of about 20°C. <P>SOLUTION: The stripping agent composition contains alkanol amine and an anticorrosive essentially comprising pyrogallol and is adjusted to a pH of 8 to 10. The alkanol amine exhibits a stripping function to remove a resist film and an etching residue; and the pyrogallol can strongly remove dissolved oxygen of a water content, provided that the pH is controlled to 8 to 10. Thus, the obtained stripping agent composition preliminarily prevents dissolved oxygen from reacting on a metal surface such as an exposed copper film, and exhibits an anticorrosion function. <P>COPYRIGHT: (C)2013,JPO&INPIT |
