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发明名称
摘要
申请公布号
JP5100313(B2)
申请公布日期
2012.12.19
申请号
JP20070284108
申请日期
2007.10.31
申请人
发明人
分类号
H01L21/316;C23C14/08;H01L21/31;H01L21/336;H01L21/8247;H01L27/115;H01L29/78;H01L29/788;H01L29/792
主分类号
H01L21/316
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代理人
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地址
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