发明名称 |
SLURRY COMPOSITION FOR CHEMICAL MECHANICAL POLISHING OF METAL AND POLISHING METHOD USING THE SAME |
摘要 |
Provided is a slurry composition for chemical mechanical polishing (CMP) of a metal. The slurry composition comprises a copolymer whose average molecular weight is from about 600,000 to about 1,300,000 and whose monomers are acrylic acid and acrylamide in a molar ratio of about 1:30 to about 30:1. The slurry composition exhibits a non-Prestonian behavior to achieve minimized dishing and attain a high degree of planarization. |
申请公布号 |
EP2212397(A4) |
申请公布日期 |
2012.12.19 |
申请号 |
EP20080704900 |
申请日期 |
2008.01.21 |
申请人 |
CHEIL INDUSTRIES INC. |
发明人 |
CHOU, HOMER;KIM, WON LAE;NOH, JONG, IL;LEE, IN KYUNG;LEE, TAE YOUNG |
分类号 |
C09K3/14;C09G1/02;C23F3/06;H01L21/321 |
主分类号 |
C09K3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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