发明名称 |
Evaluation device and evaluation method |
摘要 |
In an evaluation device an analyzer is rotated so that the azimuth of the transmission axis of the analyzer has an inclination angle of 90 degrees±3 degrees with respect to the transmission axis of a polarizer. An imaging camera captures a regularly reflected image of a wafer under each condition, and an image processing unit evaluates the shape of a repeating pattern and detects dose defects and focus defects on the basis of the two images of the wafer captured by the imaging camera. |
申请公布号 |
US8334977(B2) |
申请公布日期 |
2012.12.18 |
申请号 |
US201113067101 |
申请日期 |
2011.05.09 |
申请人 |
FUKAZAWA KAZUHIKO;KUDO YUJI;NIKON CORPORATION |
发明人 |
FUKAZAWA KAZUHIKO;KUDO YUJI |
分类号 |
G01J4/00 |
主分类号 |
G01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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