发明名称 APPARATUS FOR FABRICATING INGOT
摘要 PURPOSE: An ingot manufacturing device is provided to improve a yield of a wafer by uniformly forming temperature gradient included in a horizontal range of raw materials. CONSTITUTION: A crucible(100) accepts raw materials. A secondary heating system(120) is included inside the crucible. One or more secondary heating systems are included in an ingot manufacturing device. The supplementary heating system has a structure which is laminated from the lower side of the crucible. The secondary heating systems are touched each other.
申请公布号 KR20120135742(A) 申请公布日期 2012.12.17
申请号 KR20110054631 申请日期 2011.06.07
申请人 LG INNOTEK CO., LTD. 发明人 SHIN, DONG GEUN;SON, CHANG HYUN
分类号 C30B23/02;C30B29/36;H01L21/02 主分类号 C30B23/02
代理机构 代理人
主权项
地址