| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a system for automatic inspection, in particular, for analysis of manufacturing defects. <P>SOLUTION: A method for defect analysis includes identifying single-class classifiers for a plurality of defect classes, the plurality of defect classes being characterized by respective ranges of inspection parameter values. Each single-class classifier is configured for each class to identify defects belonging to each class on the basis of the inspection parameter values, while identifying the defects not in each class as unknown defects. A multi-class classifier is identified which is configured to assign each defect to one of the plurality of the defect classes on the basis of the inspection parameter values. Inspection data is received, and both the single-class and multi-class classifiers are applied to the inspection data to assign the defect to one of the defect classes. <P>COPYRIGHT: (C)2013,JPO&INPIT |
