| 摘要 |
<P>PROBLEM TO BE SOLVED: To surely convey objects to be irradiated while bringing them into tight contact with each other in an area to be irradiated with electron beams without pressing complicated work on a user. <P>SOLUTION: An electron beam irradiation system 100 comprises an electron beam irradiation device 200, a first conveyance device 310, a second conveyance device 320, a feed-out section 370 and a control device 390. The electron beam irradiation device 200 irradiates an object W to be irradiated with electron beams. The first conveyance device 310 passes the object to be irradiated through an irradiation region R in which the object to be irradiated is irradiated with electron beams by the electron beam irradiation device. The second conveyance device 320 is provided at an upstream side of the first conveyance device in a conveyance direction of the object to be irradiated, conveys the object to be irradiated at a conveyance velocity V2 higher than a conveyance velocity V1 of the first conveyance device, and carries out the object to be irradiated to the first conveyance device. The feed-out section 370 feeds out the object to be irradiated to the second conveyance device. The control device 390 controls the conveyance speed V1, the conveyance speed V2 and a feed interval PT in accordance with the object to be irradiated. <P>COPYRIGHT: (C)2013,JPO&INPIT |
