| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thermal flowmeter which is capable of reducing a flow rate error caused by an attitude change of a flow rate sensor. <P>SOLUTION: A thermal flowmeter comprises a flow rate sensor which is integrated in a sensor housing, and an inclination sensor 4 which detects an attitude change of the flow rate sensor. The flow rate sensor includes a flow rate correction section 37 which corrects a flow rate error caused by the attitude change. The flow rate correction section 37 has a correction map recording therein correlation data of the flow rate error caused by the attitude change of the flow rate sensor and an intake amount, the flow rate error is determined by the correction map on the basis of a detection result of the inclination sensor 4, and the intake amount detected by the flow rate sensor is corrected in accordance with the flow rate error. If the attitude change of the flow rate sensor is detected by the inclination sensor 4, the flow rate error is determined on the basis of the detection result of the inclination sensor 4, and the intake amount detected by the flow rate sensor is corrected just by the flow rate error, thereby reducing the flow rate error caused by the attitude change of the flow rate sensor. <P>COPYRIGHT: (C)2013,JPO&INPIT |
