发明名称 METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE, AND DRY FILM RESIST
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide with less optical loss. <P>SOLUTION: The method for manufacturing an optical waveguide includes the following steps (I) to (III). They are: (I) a step of forming a photocurable resin composition layer 4 containing a photo-radical initiator and a polymerizable compound, and a water-soluble non-photocurable resin composition layer 3, in this order from below, on a lower clad 1 formed on a substrate 2; (II) an exposure step of exposing the photocurable resin composition layer 4 by use of a photomask 6 to form a core part 8; and (III) an alkali development step of removing an unexposed part of the photocurable resin composition layer 4 and the water-soluble non-photocurable resin composition layer 3 with an alkali developing solution. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012247637(A) 申请公布日期 2012.12.13
申请号 JP20110119386 申请日期 2011.05.27
申请人 ADEKA CORP 发明人 IWASHIMA TOMOYUKI
分类号 G02B6/12;G02B6/13;G03F7/004;G03F7/027;G03F7/033;G03F7/075;G03F7/11 主分类号 G02B6/12
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