| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide novel silicon-germanium hydride compounds, methods for their synthesis, methods for their deposition, and semiconductor structures made using the novel compounds. <P>SOLUTION: The compounds are defined by formula: (SiHn1)x(GeHn2)y. In the formula, x is 2, 3, or 4, y is 1, 2, or 3, x+y is 3, 4, or 5, n1 is independently 0, 1, 2, or 3 for each Si atom in the compound to satisfy valency, and n2 is independently 0, 1, 2, or 3 for each Ge atom in the compound to satisfy valency. However, when y is 1, n2 is not 0. When x is 3 and y is 1, n2 is 2 or 3. When x is 2 and y is 1, n2 is 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
