| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensitive substrate for sensing a shallow crack which is generated in a bending part and an acceleration sensor using the sensitive substrate. <P>SOLUTION: A sensitive substrate 20 includes: a frame part 11; a weight part 12 installed inside the frame part 11; a bending part 13 configured to connect the frame part 11 and the weight part 12, and to bend according as the weight part 12 displaces; a piezoresistance 14 formed in the bending part 13 whose resistance value changes according to the oscillation of the weight part 12; an electrode pad 15a for piezoresistance arranged in the frame part 11, and configured to extract a signal from the piezoresistance 14; and a distributed wiring part 16 configured of distributed wiring connecting the piezoresistance 14 and the electrode pad 15a for piezoresistance. The surface of the bending part 13 is formed with a metallic wiring part 17 made of metal, and the metallic wiring part 17 is connected to an electrode pad for the metallic wiring part arranged in the frame part 11 for extracting a signal from the metallic wiring part 17. <P>COPYRIGHT: (C)2013,JPO&INPIT |
