| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a guide device that effectively executes posture control when a slider is seated on a guide rail. <P>SOLUTION: A recessed part 13d of a first support face 13a and a recessed part 13f of a second support face 13b are connected to compressed-air sources A, B via piping systems which can independently stop the supply of fluid, that is, via a first passage 13h and a second passage 13i. Therefore, for example, when air supply is interrupted by closing a valve V2, the first support face 13a can be seated on a first guide face 12a while maintaining a gap between the second support face 13b and a second guide face 12b. Alternatively, when air supply is interrupted by closing a valve V3, the second support face 13b can be seated on the second guide face 12b while maintaining a gap between the first support face 13a and the first guide face 12a. Thereby, when a slider 13 is made stationary, a workpiece placed on a table or the like connected thereto can be positioned highly accurately and as a result, processing accuracy or inspection accuracy can be improved. <P>COPYRIGHT: (C)2013,JPO&INPIT |
