发明名称 USING OPTICAL DEFLECTION OF CANTILEVERS FOR ALIGNMENT
摘要 A calibration leveling system and method are provided which improve printing and imaging at the nanoscale including improved tip-based deposition and nanolithography. The system can include a scanning probe instrument having a video camera with an adjustable lens. The scanner can be coupled to a one or two dimensional array of cantilevers comprising cantilever tips for imaging or printing. The scanning probe instrument has one or more motors for controlling the scanner in the z-axis. The z-axis motors position the scanner so that the cantilever tips are in a level orientation relative to the surface of a substrate. Once the cantilever tips are level with the substrate, the positions of the z-axis motors can be recorded for future reference.
申请公布号 US2012317684(A1) 申请公布日期 2012.12.13
申请号 US201213593266 申请日期 2012.08.23
申请人 HAAHEIM JASON;NANOINK, INC. 发明人 HAAHEIM JASON
分类号 G01Q40/00 主分类号 G01Q40/00
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