发明名称 BLOCK COPOLYMER AND RESIST UNDERLAYER FILM-FORMING COMPOSITION
摘要 <p>[Problem] To provide a novel block copolymer, a method for producing the same, and a lithographic resist underlayer film-forming composition using the block copolymer. [Solution] A block copolymer having a structure represented by formula (1), where P and Q each independently represent a divalent organic group between two carbon atoms; s, t, and u each independently represent an integer 10 or higher; the two R1s each independently represent a hydrogen atom or methyl group; the two R2s each independently represent a hydrogen atom, phenyl group, benzyl group, naphthyl group, anthracenyl group, C1-13 alkyl group, or a group including a lactone ring, at least one hydrogen atom of the phenyl group, naphthyl group, anthracenyl group, or alkyl group being optionally substituted by a hydroxyl group, C1-13 alkoxy group, or halogen atom; and the two X's each independently represent an ester bond, an amide bond, or a single bond.</p>
申请公布号 WO2012169580(A1) 申请公布日期 2012.12.13
申请号 WO2012JP64668 申请日期 2012.06.07
申请人 NISSAN CHEMICAL INDUSTRIES, LTD.;SAKAMOTO, RIKIMARU;HO, BANGCHING 发明人 SAKAMOTO, RIKIMARU;HO, BANGCHING
分类号 C08G59/40;G03F7/11;H01L21/027 主分类号 C08G59/40
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