System for analysing semiconductor test data

摘要

The system (200) has a data input module (202) receiving semiconductor test data, and databases (226, 242) storing the semiconductor test data and test data models, where each test data model is associated with a value corresponding to output data indicating a recommendation to modify an associated process for producing a silicon wafer. A processing module (232) analyzes the values of the semiconductor test data and/or values derived from the test data to identify a match with one of the test data models, and to provide the output data value indicating the associated recommendation. An independent claim is also included for a method for processing semiconductor test data on elementary zones formed by a process for producing a silicon wafer.