| 摘要 |
PURPOSE: A substrate inspection apparatus, a substrate inspection method, and a storage medium are provided to prevent an inspection problem of a substrate due to illumination degradation in a lighting part without transferring a controlling substrate to the apparatus. CONSTITUTION: A mode selection part(46) selects a mode from a loading table inspection mode and a maintenance mode. A light guiding member is installed within a housing and guides light of a lighting part to an image pickup device. A determination part determines whether or not the brightness of the light in the lighting part acquired by the image pickup device is in a predetermined tolerance range using the light guiding member when the maintenance mode is executed. A notifying part(45) notifies that it is necessary to have the exchange of the lighting part when the determination part determines the brightness of the light is beyond the predetermined tolerance range. [Reference numerals] (30,HH) Image pickup device 1-2048; (32) Lens; (34) A/D converter; (35) Output correction part; (36) Signal processing part; (37) Converting part; (4) Control part; (42) CPU; (43) Program storing part; (45) Display part(notifying part); (46) Input part; (51) Program for an inspection mode; (52) Program for a maintenance mode; (53) Target value of brightness, upper bound of a indication value, and tolerance range of the difference from the target value; (55) Lamp exchange date; (56) Reference data; (62) Elapsed time of the indication value; (63) Need or not need for lamp exchange, the presence of indication value change; (AA) Image pickup device; (BB) Digital value(0-255); (CC) Brightness(0-255); (DD) Correction value; (EE) Indication value; (FF) Indication value setting data; (GG) Determined indication value; (II) Brightnessα-γ
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