| 摘要 |
PURPOSE: A manufacturing method of silicon carbide heat storage material from silicon sludge is provided to recycle silicon waste sludge generated during semiconductor or solar cell wafer process, thereby reducing manufacturing cost of the silicon carbide heat storage material. CONSTITUTION: A manufacturing method of silicon carbide heat storage material from silicon sludge comprises the following steps: providing silicon sludge generated in the silicon wafer cutting process; removing a part of oil by heat treating the silicon sludge under the non-oxidizing atmosphere; manufacturing slurry by mixing the silicon sludge with binder; manufacturing a honeycomb structure molded product(100) by extruding the slurry; and reaction sintering the molded product at 1300-1900 deg. Celsius under the non-oxidizing atmosphere. The silicon sludge includes SiC powder. The heat treatment in the oil elimination step is performed at 100-600 deg. Celsius. The silicon sludge after the oil elimination step includes 0.1-10 wt% of oil. |
