发明名称 |
WIRE SAW APPARATUS, AND CUTTING METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To suppress local tension variation of a wire caused during swinging cutting. <P>SOLUTION: There is provided a wire saw apparatus 1 which cuts a workpiece W by pressing the workpiece against a cutting wire 3 which swings while reciprocally traveling. The wire saw apparatus includes: a wire guide support part 4 which swings; a pair of wire guides 2, 2 disposed at the wire guide support part 4; a wire group 3a formed between the pair of wire guides 2, 2 by winding the cutting wire 3 around the pair of wire guides 2, 2; a wire supply device 6 and a wire winding device 7 capable of unwinding and winding the cutting wire 3; a workpiece holding part 50 which is displaced to press the workpiece W against the wire group 3a; and a controller 8. The controller 8 has traveling speed control means 8a controlling the traveling speed of the cutting wire 3, and swinging speed control means 8b controlling an increase or a decrease in swinging speed of the wire guide support part 4 according to an increase or a decrease in the traveling speed of the cutting wire 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2012240125(A) |
申请公布日期 |
2012.12.10 |
申请号 |
JP20110109054 |
申请日期 |
2011.05.16 |
申请人 |
TOYO ADVANCED TECHNOLOGIES CO LTD |
发明人 |
FUKUMAN MASARU;IWAI TOSHIMITSU |
分类号 |
B24B27/06;B28D5/04;H01L21/304 |
主分类号 |
B24B27/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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