| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent pattern collapse when a substrate is dried by removing a liquid on the substrate having a pattern of protrusions and recesses formed on the surface. <P>SOLUTION: A method of drying a substrate by removing a liquid on the substrate having a pattern of protrusions and recesses formed on the surface includes a sublimable substance filling step for filling the recesses of the pattern with a solution by supplying a solution (SL) of a sublimable substance to the substrate, a solvent drying step for filling the recesses of the pattern with the sublimable substance (SS) in solid state by drying the solvent in the solution, and a sublimable substance removal step for removing the sublimable substance from the substrate by heating the substrate at a temperature higher than the sublimation temperature of the sublimable substance. <P>COPYRIGHT: (C)2013,JPO&INPIT |
